Plus-Tech
Plus-Tech manufactures and supplies semiconductor grade slurry distribution and chemical distribution systems.
Plus-Tech systems include CMP processing slurry distribution systems, various types of chemical blending systems and UHP (ultra-high purity) chemical distribution systems for the semiconductor and flat panel display industries.
Plus-Tech strives to exceed industry demands with advanced technology and reliable equipment for CMP slurry processes.
Plus-Tech Product Line
- STI-Ceria slurry distribution system
- Oxide slurry distribution system
- Metal (W, Cu, Al, Poly) slurry distribution system
- Chemical blending system (SC1, NH4OH, HF and TMAH)
- Chemical distribution system (acid, caustic, solvent)
- ACQC (Auto Clean Quick Coupling) system
- Flow control system for CMP polishing systems
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