ISIS sentronics
ISIS sentronics GmbH manufactures and commercializes optical non-contact metrology sensors and systems for the semiconductor, photomask and flat panel display industries. Main applications from ISIS enable thickness measurement of semiconductor materials, glass materials, and glue layers for single or multi layer thicknesses up to 2mm, including non-polished surfaces. Individual layers can be measured in thicknesses of 3 to 10µm, depending on material properties.
ISIS StraDex sensors can be integrated into grinding systems as pre or post processing gauges or for direct in-line control. Flatness, bow/warp and 3D surface topography (mini-bumps) can also be evaluated.
The ISIS SemDex system is a stand-alone semi-automated wafer inspection tool with integrated StraDex sensors for manual loading and automated measurement capabilities. The convenient recipe structure of the "WaferSpect" software renders it a convenient tool for production facilities.
The patented ISIS interferometric (SCI) evaluation process is well-suited to the production environment and enables end users to achieve high acquisition speeds with highly accurate results.
For more information on ISIS sentronics, contact Metron: info@metrontech.com
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