Core Systems
Ion source conditioning is a simplified process when using the Krytek 300 from Core Systems.
The Krytek 300 is a conditioner that simulates and conditions an ion source off-line as if it was in an ion implanter. The conditioning processs eliminates early mortality and improves implanter productivity and availability. End users will find that the Krytek 300 assists in improving dose control as vacuum conditions are enhanced, a result that is particularly evident in implanters or recipes with a high sensitivity to neutrals.
Core Systems offers repair and refurbishment services for high current implanter disks and components of legacy and advanced implanter technology, including the following systems: Axcelis/Eaton NV series; Axcelis/Eaton GSD series (Superdisk); Varian VIISion (and E1000) series; Varian 80/120/160-10 and XP series; Varian High Energy (Genus) 1500 and Kestrel series; Applied Materials 9X00 series (heat sinks, pedestals and entire whell).
For more information on Krytek 300 ion source conditioner and Core implanter refurbishment services, contact Metron: info@metrontech.com
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