Chamber Performance Services literature is available upon request. Email info@metrontech.com today to request more information on any of the applications listed.

Applied Performance Kits

• Total Kit Management Overview (Applied Performance Kits)
• Anguard for Etch Upper Chamber Bodies
• CleanCoat™ for PVD applications
• HeadSmart™ and Quickstart™ for CMP head conditioning

Analytical Testing Services

• Chemical Analysis
• Ultrapure Water Analysis
• Cleanroom Components and Consumables Analysis
• Wafer Analysis
• Trace Metals Analysis by Inductively Coupled Plasma Mass Spectrometry (ICP-MS)
• Advances in Wafer Analysis by VPD ICP-MS
• Bacteria Counting in Ultrapure Water Systems
• Silica in Ultrapure Water
• Trace Anions and Cations in Ultrapure Water
• Characterization of Particles in Ultrapure Water
• Cleanroom Components and Materials Testing
• Organic Contamination on Silicon Wafers

Metron Precision Cleaning and Coating

• UltraChem Cleaning and Validation of Critical Tool Performance
• UltraChem Cleaning and Validation of Critical HDP-CVD Components
• UltraChem Cleaning and Validation of Critical Etch Components

For more information on this Literature or Chamber Performance Services, contact info@metrontech.com today.