As your service provider, Metron Precision Cleaning and Coating manages the risks in the manufacturing process to return the highest possible return on investment. With a consistent, controlled cleaning process, established global infrastructure, and advanced coating techniques, Metron Precision Cleaning and Coating applies an optimized part cleaning method to lower the overall cleaning cost and chamber cost of ownership.

The Precise Approach

• Development of cleaning methods with OEM equipment manufacturers with highly qualified engineers
• Validation of cleaning methods through chamber performance and analytical testing
• Definition of cleaning specifications for all component types
• Documentation of process
• Training and certification of engineers and operators to stringent protocols
• Establishment of process controls for critical cleaning parameters
• Testing and certification of clean parts to align with performance specifications
• 100% inspection of parts

Quality Standards

• On-going monitoring and stringent control of process, environment and equipment
• Leading-edge systems in all Metron global analytical testing locations
• Ongoing services detail incoming parts, in-process parts, and status upon final inspection
• Computerized data tracking capabilities
• SPC controls
• Segregation to ensure cleanliness of cleaning processes

Chambers Supported by Metron

Metron Precision Cleaning and Coating services a wide range of chambers from the following process applications:

• Etch
• CVD
• ALD
• PVD
• EPI/RTP

Kit Characterization

Characterization of kits is critical to ensuring the integrity of process chambers. With Metron, customers are able to qualitatively check part and kit cleanliness. Performing extensive testing on parts, Metron determines with customers a baseline for performance. Cleaning methods are performed to the baseline standard, and through a multi-stage testing process parts are verified prior to return providing customers with a pre and post-clean comparison.

Characterization Techniques

• Coordinate Measuring Machines (CMM) for critical dimensions of chamber parts
• Profilometry for surface roughness
• LPC for embedded particles
• QIII surface particle counter
• VPD-ICP-MS for trace metal analysis
• GC-MS for organic analysis
• Ion analysis
• SEM-EDX for surface morphology and elemental analysis
• Special parts and CVD faceplates

For more information on Metron Precision Cleaning and Coating, contact info@metrontech.com today.