ChemTrace Analytical Test Services are employed by customers worldwide to identify sources of contamination in clean manufacturing environments. ChemTrace facilities are outfitted with state of the art analytical equipment to secure results that allow our customers to make informed decisions regarding their manufacturing processes. Analytical testing services are available as bundled services to augment Metron Precision Cleaning and Coating services, Applied Performance Kits and as stand-alone services. For a complete listing of testing capabilities, visit the Literature section of this website.

How Clean is Clean?

With ChemTrace Analytical Test Services, customers find the answer to the question, "How clean is clean?" ChemTrace provides the techniques to characterize materials that range from process consumables to chamber components, identifying trace metals, anions, cations, and organics. Process experts engage with customers to set clean standards and baseline the characteristics of process components and materials. These methods are central to the Applied Kit Management program, allowing the capability to develop fully-characterized and optimized service standards based on quantitative data.

Validation of Part Cleanliness

Contamination-free manufacturing is essential to cost reduction in the fab and to achieve maximum yield. Improved yield is enabled through process control, defect reduction and improved equipment reliability. Tool cleanliness is crucial for advanced technologies of 90nm, 65nm and beyond. Although traditional analytical techniques such as SIMS, AES and XPS are considered acceptable for detection of inorganic and organic contamination on a 4x4" coupon, these techniques are not robust enough to provide reliable treating of tool components. ChemTrace Analytical Test Services provides the solutions to these challenges. Employing proprietary non-destructive analytical techniques, ChemTrace measures and verifies the cleanliness of coupons and 200mm and 300mm tool components with the highest degree of sensitivity.

ChemTrace Analytical Techniques

• Inductively Coupled Plasma-Mass Spectrometry (ICP-MS)
• Particle count analysis by Laser Light Scattering Optical Particle Counters (LPC)
• Autotitration for assay analysis of acids and bases
• Gas Chromatography (GC) for assay analysis of solvents
• Chemical Mechanical Polishing (CMP) slurry analysis
• Ion Chromatography (IC) for anion analysis in chemicals
• Gas Chromatography-Mass Spectrometry (GC-MS) to identify organic impurities in solvents
• Karl Fischer titration moisture analysis in solvents
• Total Organic Carbon (TOC) analysis in chemicals
• SEMI wet analysis

For more information on ChemTrace Analytical Test Services, contact info@metrontech.com today.