Vector 3000, 3500, and 6000

Reliable treatment systems are critical to the productivity of advanced process tools. A treatment solution must have high uptime and be flexible enough to handle changing process and environmental needs. The EcoSys Vector™ series is uniquely suited to meet these challenges.

The Vector 3000 is a proven solution for a variety of processes including Etch and Epi. An extensive database of applications and removal efficiencies is used to customize the best solution for a given process.

The Vector 3500 is a proven solution for Metal Etch processes. This system will treat up to four process effluent streams and is tailored to high particulate forming and Metal Etch processes.

The Vector 6000 uses a second–generation pyrophoric entry that has been designed to reduce pyrophoric gases to a fraction of LEL without using external fuel sources. This treatment solution can be configured to safely treat up to three pyrophoric–containing effluent streams using a controlled addition of CDA to the inlet.

To download literature on the Vector abatement series (.PDF), click here.

• Marathon 8500
• Marathon 8600

• CDO 863

• Guardian GS4
• Guardian GS8

• Vector 3000
• Vector 3500
• Vector 6000

• Novasafe
• Novapure EGS 300
• Novagard

• Litmas