Products By Application
EcoSys offers an advanced line of point of use abatement systems and the technical expertise to determine the optimum abatement solutions that match customers' standards for manufacturing and meet emission reduction targets. An abatement solution will treat targeted gases cost effectively and at the same time ensure uptime on process tools. There are several methods employed to target and remove specific gases from manufacturing emissions. EcoSys systems allow for thermal destruction, water scrubbing, chemical resin and integrated hybrid abatement combining the aforementioned methods.
The abatement applications matrix shown here illustrates how EcoSys systems align to specific semiconductor, thin film technology (TFT) or flat panel display (FPD) applications.
To identify the optimum abatement solution for your operation, please contact Metron's EcoSys group today.
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