Novasafe
Novasafe combines high efficiency and high capacity in a compact, in-situ solution providing compliance with the Zero Impact Processing Initiative.
Novasafe is a passive abatement solution for epitaxy, ion implant and vent gas applications. As a low footprint scrubber, the Novasafe can be integrated with ion implant tools for Zero Impact Processing compliance. Effluents are abated with the Novasafe to sub-TLV levels from roughing pumps or cryo pumps. There are no moving parts to the tool; and warm-up and cool-down periods have been eliminated in the unique design. These features ensure that change-outs are accomplished easily and have no impact on operations. With its compact and low impact design, the Novasafe is the ultimate uptime abatement solution.
Applications
- Epitaxy
- Ion implant
- Vent gas
Advantages
- Approximately one year lifetime per canister
- Each canister connected to one pump
- Continuous passive operation
- In-situ controlled air oxidation of process by-products and spent resin
- Low operating cost
- Process selectable resin mix
|
