Novapure EGS 300
The Novapure series offers a safe, efficient and reliable solution for treatment of hydride and acid gases.
This unique system uses chemisorptive resin technology to treat process gases in a negative pressure environment ensuring only inbound flows. Continuous toxic gas monitoring assures total point of use gas treatment below TLV levels. In the event of a power outage, the Novapure system will continue to treat the inflows.
The built in 90% depletion sensor provides warning of breakthrough when the resin is 90% consumed. The remaining capacity allows the current process run to finish and time to schedule a shut-down for resin can replacement.
Chemisorptive resin technology irreversibly reacts with process gases and their by-products, forming nonvolatile solids. The spent resin can be easily and safely disposed following a recommended disposal program, or incinerated. 
Applications
- Ion implant
- CVD
- Metal etch
- Cylinder change purging
Advantages
- Removal efficiency below TLV levels
- Continuous passive operation
- Constant pressure control system
- Integrated toxic gas monitoring
- Low maintenance
- S2 and CE compliance
- Automatic scrubbed by-pass
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