Novagard
The Novagard Emergency Release Scrubber is a passive solution designed to safely abate catastrophic releases of hydride gases from gas cabinets, valve manifold boxes, gas isolation boxes, fume hoods, or other process equipment. Once installed, the Novagard is available 100% of the time, independent of sense and switch events.
Semiconductor process gases flow into a matrix of chemisorptive dry scrubbing media which rapidly converts the released gases into a stable, inert solid. The spent media is contained in an integral bag for safe handling and ease of disposal.
Each Novagard unit is sized specifically for the abatement challenges at the individual customer's site.
Applications
- Emergency release abatement
Advantages
- Treats released gases to below1/2 IDLH
- Passive operation
- No utilities or cooling required
- 5 year resin stand-by lifetime
- Non-reversible reaction
- Non-flammable resin materials
- Replaceable resin cartridge
- Replaceable dust pre-filter
- Integrated bag-out containment
- Dual differential pressure gauges
- Stand-alone or tandem installations
Configurations
Support for up to nine resin cartridges
- ERS1000
- ERS2000
- ERS4000
- ERS6000
- ERS9000
Available with 2”, 3”, or 4” beds
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