Marathon 8600
The Marathon 8600 is a high capacity, cost-efficient abatement solution and the only combustion-wet abatement technology capable of supporting two 3-chamber process tools with a single unit. Featuring a proprietary six-inlet design and high flow capacity, the system enables customers to reduce operating costs by more than 60% over competitive systems.
The Marathon 8600 delivers the highest achievable efficiency rate for the abatement of perfluorocompound (PFC) emissions, allowing semiconductor, flat panel display and solar cell manufacturers to meet the most stringent environmental emission targets.
A proprietary oxygen-enriched air module allows customers to substitute clean dry air for more costly oxygen — while achieving greater than 99% destruction and removal efficiency (DRE) of PFC gases. The Marathon 8600's proprietary N2 sleeved inlet assembly and continuous inward-flow chamber design deliver superior particulate management to extend preventive maintenance cycles and further reduce operating costs.
The Marathon 8600 is pre-qualified for Applied Materials' CVD, diffusion, etch, epi, and flat panel display systems. Combining the Marathon with Applied Materials process systems provides customers an optimized, cost-efficient process tool and sub-fab exhaust solution.
Applications
- Semiconductor and flat panel display processes
To download literature on the Marathon 8600 (.pdf), click here.
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