Marathon 8500
The Marathon 8500 is an advanced, point-of-use, integrated burn/wet treatment system designed to provide a controlled gas conditioning environment for today's demanding semiconductor and flat panel display process chemistries. The Marathon is the industry standard for controlled decomposition and oxidation treatment of flammable, pyrophoric, corrosive, and particulate generating process recipes.
The Marathon 8500 specifically targets PFCs from gas effluent in semiconductor fabrication and high particulate loading processes in flat panel display industry. With an advanced reactor chamber design and smart abatement technology, the Marathon 8500 is a safe and cost-effective system
Applications
- All semiconductor and flat panel display
Advantages
- Excellent PFCs abatement efficiency
- Limited NOx and CO emission
- Superior particulate management technology
- High flow capacity
- Reduced water consumption and recirculating water system
- Low cost of ownership
- Ease of installation and services
- Third party certified, SEMI S2 compliance, CE marked
- Ethernet Ready
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