Litmas
The Litmas is a world-class abatement system that offers the latest innovations in point-of-use abatement technology that have been precisely engineered to ensure maximum fab compatibility, productivity and system uptime. The Litmas is optimized for etch processes and requires only water, air and electricity to run. Installed in the fore-line between the process chamber and a vacuum pump, the Litmas employs a low-pressure plasma technology for high efficiency PFC treatment. With zero sub-fab footprint, the Litmas system is ideal for retrofit applications in fabs where space and utilities are limited.
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