Guardian GS4
The Guardian series is the industry standard for reliable, thermal oxidation and combustion of process gases. Guardian systems are designed to thermally oxidize residual process gases using active flame oxidation. The effluent gases pass through a wall of flame in the main chamber, guaranteeing ignition of flammable and pyrophoric process gas by–products.
In the Guardian, an active flame front is produced by injecting a small quantity of hydrogen or natural gas fuel
ignited by redundant, fail–safe ignitors. Dilution air enters the chamber perpendicular to the process gas flow. This creates a swirling action for high efficiency air and process gas mixing. The combustion chamber and gases are air-cooled, eliminating the need for water cooling. The cooled reaction gases exit the Guardian and flow to the house exhaust system. Multiple safety interlocks provide a high level of safety during operation.
Over 1,500 installations worldwide have proven the Guardian series is safe and effective at treating flammable gases from process effluents and gas cabinet vent lines. Instantaneous shutoff of fuel and igniters eliminates a potential ignition source from upstream gas flows. With no moving parts, maintenance intervals are extended with MTBF measured in years. Guardian technology is a proven effective solution for thermal oxidation. 
Applications
- Polysilicon
- CVD
- Pyrophoric/flammable gas combustion
- Gas cabinet vent purge
Advantages
- Simultaneous treatment for multiple process chambers and/or furnace tubes
- Low cost of ownership
- No electrically heated elements for immediate cooldown
- Flame flashback prevention system for safe, reliable operation
- Low maintenance requirement
- MTBF measured in years
- Small footprint
- S2-93 compliant
- CE–mark certified
Configurations
- Floor–mount
- Hydrogen Fuel
- Natural Gas Fuel
- Ceiling–mount with remote interface
- Hydrogen Fuel
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