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EcoSys provides the most comprehensive line of environmental abatement systems to the global semiconductor industry.

Semiconductor manufacturers require a wide range of toxic and hazardous gases to build devices. The technology that scrubs one gas family best may not necessarily be the most effective or cost efficient solution for another gas type. Through Metron, EcoSys offers all of the point-of-use (POU) scrubbing solutions that are necessary: wet, dry and thermal.

Different situations require different technologies or may demand a combination of scrubbing methods to properly abate chip-manufacturing exhausts. From a single unit to full outfitting of every POU abatement product throughout an entire fab, Metron offers the products, technology, engineering and on-site service expertise necessary to solve any semiconductor effluent POU challenge.

The PFC abatement suite from EcoSys

EcoSys Systems Training
Once your POU abatement system is installed you can protect your investment by properly training your team through classroom and hands-on instruction offered by Metron Training.

Contact Metron Training for information on environmental abatement solutions training courses.

 
Combustion - Wet Thermal - Wet Combustion Wet Adsorption Plasma