CDO 863
The CDO™ series is an advanced point–of–use integrated thermal-wet treatment system designed to provide a controlled gas conditioning environment for today's demanding semiconductor process chemistries. The CDO series is the industry standard for controlled decomposition-oxidation treatment of flammable, pyrophoric, corrosive, and particulate generating process recipes.
The CDO 863 was specifically designed to treat fluorine generated by plasma chamber clean applications
without the use of fuel or toxic reagents. Constructed with advanced metal alloys for corrosion resistance,
the CDO 863 is the safest, most cost–effective abatement system for the treatment of F2 at the point–of–use ensuring customers the highest reliability and tool uptime.
The patented water reagent technology incorporated in the CDO 863 combined with the latest advancements
in system reliability provide the lowest cost of ownership for treating fluorine–based effluent.
Applications
- Flourine-based process chamber cleans
Advantages
- Designed for point-of-use fluorine
abatement without fuel or toxic reagents
- Will treat incompatible gases from multiple process outlets
- Reduced water consumption with recirculating water system
- Non-clogging entry design
- Lowest cost of ownership
- Advanced alloys for improved corrosion resistance
- Ease of installation with standard pressurized drain
- Moisture suppression system reduces
downstream condensation
- Semi S2 and CE compliant
Configurations
- Number of inlets (1-4)
- Fire retardant tank material- FM4910
Tool Communication and Interlocks
- Multiple dry contacts for customer defined requirements
Options and Accessories
- Remote indication box
- De-ionized water generator
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